Concepedia

Publication | Closed Access

Effects of chemical mechanical polishing on a porous SiCOH dielectric

DOI

11

Citations

12

References

2011

Year

S. James Gates, Satyavolu S. Papa Rao, V. Anandan, Mahadevaiyer Krishnan, S. Cohen, Y. Ostrovski, N. Klymko, M. A. Chace, D. Canaperi
Microelectronic Engineering

References

YearCitations

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