Atomic Force Microscopy Study of Self-Affine Fractal Roughness of Porous Silicon Surfaces

Naohisa Happo, Makoto Fujiwara, Masao Iwamatsu, Kenju Horii

Japanese Journal of Applied Physics · 1998 · 31 citations · 14 references

Concepts

Abstract

Atomic force microscopy was used to measure the “roughness” exponents of the rough porous silicon surfaces formed by electrochemical anodization. It was found that the porous Si surfaces have a self-affine fractal structure characterized by roughness exponents α=0.53–0.64, fractal dimensions D =2.36–2.47 and a growth exponent β=0.24 ±0.02.

References

14