Study of Residual charing in dielectric less capacitive MEMS switches

Abstract

Dielectric charging is one of the most challenging issues in RF-MEMS capacitive switches. Dielectric less capacitive switch is shown with a measured on to off ratio of 9. The reliability of the switch has been studied and residual pull in voltage shift has been observed. For the first time, charging results are presented on this type of switch and validated up to one month. It is shwon that charging can be modeled using a simple Curie-Von Schweidler equation. This model has been validated, with good agreement between the coefficients determined after holding down the switch for about 10000 s, and further experimenal results up to one month in the down state.