The mechanism of field-assisted silicon-glass Bonding

High-performance heat sinking for VLSI

David B. Tuckerman, R. F. W. Pease · IEEE Electron Device Letters · 1981 · 5.2K citations

Engineering, Computer Engineering, Electrical Engineering +17

A gas chromatographic air analyzer fabricated on a silicon wafer

S.C. Terry, J.H. Jerman, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 1.4K citations

Natural Sciences, Chemical Engineering, Chemistry +17

Field Assisted Glass-Metal Sealing

George Wallis, D. Pomerantz · Journal of Applied Physics · 1969 · 730 citations

Natural Sciences, Materials Engineering, Materials Science +7

A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 507 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Effect of an Electric Field on Silicon Oxidation

Paul J. Jorgensen · The Journal of Chemical Physics · 1962 · 189 citations

Natural Sciences, Materials Engineering, Materials Science +17