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Residual stresses and crystalline quality of heavily boron-doped diamond films analysed by micro-Raman spectroscopy and X-ray diffraction

Materials ScienceDiamond-like CarbonBoron NitrideMaterial AnalysisEngineeringHexagonal Boron NitrideX-ray DiffractionApplied PhysicsThin FilmsBoron-doped Diamond FilmsResidual StressesMicrostructure