Publication | Closed Access
A quantum chemical study of ZrO2 atomic layer deposition growth reactions on the SiO2 surface
48
Citations
15
References
2003
Year
Materials ScienceIi-vi SemiconductorChemical EngineeringEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsSio2 SurfaceQuantum Chemical StudyChemical DepositionEpitaxial GrowthChemical Vapor Deposition
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