Concepedia

Yuniarto Widjaja

YW

Statistics

Publications

11

Citations

782

H-Index

11

Active since

2000

Affiliations

Stanford University(Current)

Yuniarto Widjaja is an author at Stanford University specializing in engineering, surface science, and applied physics.

Top concepts

EngineeringSurface ScienceChemistryApplied PhysicsMaterial ScienceSurface ChemistryPhysical ChemistryNatural SciencesChemical KineticsQuantum Chemistry

Publications per year

2000–2004

11

Publications

11

Quantum chemical study of the mechanism of aluminum oxide atomic layer deposition

Yuniarto Widjaja, Charles B. Musgrave · Applied Physics Letters · 2002 · 189 citations

Aluminium Nitride, Engineering, Solid-state Chemistry +17

Ab Initio Study of Adsorption and Decomposition of NH<sub>3</sub> on Si(100)-(2×1)

Yuniarto Widjaja, Michael M. Mysinger, Charles B. Musgrave · The Journal of Physical Chemistry B · 2000 · 124 citations

Engineering, Chemistry, Molecular Dynamics +17

A density functional theory study of the nonlocal effects of NH3 adsorption and dissociation on Si(100)-(2×1)

Yuniarto Widjaja, Charles B. Musgrave · Surface Science · 2000 · 109 citations

Engineering, Physicochemical Analysis, Surface Chemistry +12

Atomic layer deposition of hafnium oxide: A detailed reaction mechanism from first principles

Yuniarto Widjaja, Charles B. Musgrave · The Journal of Chemical Physics · 2002 · 101 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Quantum chemical study of the elementary reactions in zirconium oxide atomic layer deposition

Yuniarto Widjaja, Charles B. Musgrave · Applied Physics Letters · 2002 · 54 citations

Materials Science, Inorganic Chemistry, Zirconium Tetrachloride +14

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