Fabrication and characterization of a new varifocal liquid lens with embedded PZT actuators for high optical performances

Abstract

This paper reports the fabrication and characterizations of a compact varifocal lens with an embedded PZT actuator. Optical aperture is typically up to 3 mm diameter with a total component thickness down to 400μm. High power efficiency (lower than 0.1 μW), high speed response time (down to 1 ms), high electro-optical performances (10 diopters optical power variation at 10V) and good optical quality (wavefront error lower than 50 nm) is reported through this paper.