Comparison of the Young’s modulus of polysilicon film by tensile testing and nanoindentation

Materials issues in microelectromechanical systems (MEMS)

S.M. Spearing · Acta Materialia · 2000 · 652 citations

Engineering, Materials Engineering, Materials Science +14

A new technique for measuring the mechanical properties of thin films

W. N. Sharpe, Biao Yuan, R. L. Edwards · Journal of Microelectromechanical Systems · 1997 · 394 citations

Natural Sciences, Materials Engineering, Materials Science +16

Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon

W. N. Sharpe, Bin Yuan, Ranji Vaidyanathan et al. · 1997 · 270 citations

Engineering, Materials Engineering, Materials Science +17

Tensile testing of polysilicon

W. N. Sharpe, Katrin Turner, R. Lawrence Edwards · Experimental Mechanics · 1999 · 148 citations

Natural Sciences, Materials Engineering, Materials Science +9

Round-Robin Tests of Modulus and Strength of Polysilicou

W. N. Sharpe, Stuart B. Brown, George C. Johnson et al. · MRS Proceedings · 1998 · 76 citations

Natural Sciences, Materials Engineering, Materials Science +12