Journal of Materials Science · 1978 · 20 citations · 5 references
EngineeringMaterials EngineeringMaterials ScienceChemical KineticsSemiconductor DevicesTransport PhenomenaChemical Reaction KineticsKinetic ModelingMetallurgical KineticsSilicon MaterialsSurface KineticsSurface Reaction KineticsNitridationNitride PassivationSiliconSilicon NitrideSilicon Oxidation
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