Concepedia
Vacuum · 1993 · 44 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceHeat TransferSurface ScienceThin FilmsHeat ConductionMagnetic Thin FilmsThin-film DepositionEnergy DepositionEnergy Deposition ProfilesMagnetron SputteringSputteringSputtering Processes
15
An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering
H. Windischmann · Journal of Applied Physics · 1987 · 401 citations
Natural Sciences, Materials Engineering, Materials Science +16
Gas density reduction effects in magnetrons
S. M. Rossnagel · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1988 · 274 citations
Natural Sciences, Nuclear Engineering, Physics +16
Film modification by low energy ion bombardment during deposition
S. M. Rossnagel, J. J. Cuomo · Thin Solid Films · 1989 · 127 citations
Natural Sciences, Materials Engineering, Materials Science +14
Plasma Diagnostics and Energy Transport of a dc Discharge Used for Sputtering
Doug Ball · Journal of Applied Physics · 1972 · 104 citations · Full text
Natural Sciences, Electrical Engineering, Physics +16
Slowing down and thermalization of sputtered particle fluxes: Energy distributions
A. Gras-Martí, J. A. Vallés-Abarca · Journal of Applied Physics · 1983 · 102 citations
Natural Sciences, Physics, Heat Transfer +16