Fernando Guimarães

Study of an argon magnetron discharge used for molybdenum sputtering. I. Collisional radiative model

Fernando Guimarães, J. Bretagne · Plasma Sources Science and Technology · 1993 · 45 citations

Argon Magnetron Discharge, Electrical Engineering, Stepwise Excitation +13

Energy deposition and substrate heating during magnetron sputtering

M. Andritschky, Fernando Guimarães, V. Teixeira · Vacuum · 1993 · 44 citations

Materials Engineering, Magnetism, Engineering +6

Modeling of the energy deposition mechanisms in an argon magnetron planar discharge

Fernando Guimarães, J. Almeida, J. Bretagne · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 36 citations

Binary Collisions, Electrical Engineering, Engineering +14

Study of an argon magnetron discharge used for molybdenum sputtering. II. Spectroscopic analysis and comparison with the model

Fernando Guimarães, José B. Almeida, J. Bretagne · Plasma Sources Science and Technology · 1993 · 27 citations

Argon Magnetron Discharge, Molybdenum Cathode, Engineering +13

Mechanical and surface analysis of Ti0.4Al0.6N/Mo multilayers

Carlos J. Tavares, L. Rebouta, M. Andritschky et al. · Vacuum · 2001 · 11 citations · Full text

Materials Science, Materials Engineering, Surface Characterization +4