The formation of porous silicon by chemical stain etches - Concepedia

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The formation of porous silicon by chemical stain etches

56

Citations

6

References

1986

Year

M.I.J. Beale, J. D. Benjamin, Michael J. Uren, N. G. Chew, A. G. Cullis

Journal of Crystal Growth

Materials ScienceChemical EngineeringEngineeringMicrofabricationSurface ScienceSilicon On InsulatorPlasma EtchingPorous Silicon

References

	Year	Citations

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