Molecular effect on projected range in ultralow-energy ion implantation

Kenji Kimura, Y. Oota, K. Nakajima, Motofumi Suzuki, Takaaki Aoki, Jiro Matsuo, Aditya Agarwal, B.S. Freer, A. F. Stevenson, M. Ameen

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 10 citations · 10 references

Concepts

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