Concepedia

Y. Oota

YO

Statistics

Publications

3

Citations

84

H-Index

3

Active since

2003

Affiliations

Kyoto University(Current)

Y. Oota is an author at Kyoto University specializing in engineering, physics, and applied physics.

Top concepts

Publications per year

2003–2004

3

Publications

3

High-resolution RBS: a powerful tool for atomic level characterization

Kenji Kimura, S. Joumori, Y. Oota et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2004 · 64 citations

, , +8

High-resolution depth profiling of ultrashallow boron implants in silicon using high-resolution RBS

Kenji Kimura, Y. Oota, K. Nakajima et al. · Current Applied Physics · 2003 · 10 citations

, , +8

Molecular effect on projected range in ultralow-energy ion implantation

Kenji Kimura, Y. Oota, K. Nakajima et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 10 citations

, , +3

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