Ellipsometric parameters and reflectances of thin films with slightly rough boundaries

Abstract

Abstract In this theoretical paper, formulae for important optical quantities of single layers with slightly randomly rough boundaries are derived by means of a generalized Rayleigh–Rice theory. Thus the formulae for the specular reflectances and ellipsometric parameters of the layers mentioned are presented. The theoretical results are illustrated by a numerical analysis. Practical features implied by this analysis to be relevant from the experimental point of view are introduced as well. Moreover, relations expressing the flux of scattered light are presented.