Comments on Inorganic Chemistry · 1995 · 16 citations · 31 references
Natural SciencesChemistryMaterials ScienceInorganic ChemistryMaterials ChemistryPhysical ChemistryChemical Vapor DepositionMetalsAluminum Gallium NitrideAluminum NitrideChemical Vapor Deposition PrecursorsGallium NitrideNitride Thin FilmsNitrides SynthesisNitrides Thin FilmsPrecursor Design
Abstract A review of the preparation of single source precursors (SSPs) to the group III metal nitrides (aluminum nitride, gallium nitride and indium nitride) is given. The SSPs are divided into three categories (1) volatile small molecules for chemical vapor deposition studies, (2) polymeric precursors for the formation of fibers and thin films, and (3) compounds developed for the formation of small-particle powders. The methods for conversion of the SSPs into the desired nitrides and the analysis of the resulting nitride materials are given whenever possible. Key Words: aluminum nitridegallium nitrideindium nitridenitride filmschemical vapor depositionsingle source precursor
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Chemical vapour deposition of nitride thin films
David M. Hoffman · Polyhedron · 1994 · 151 citations
Natural Sciences, Materials Engineering, Materials Science +14