Quantitative analysis of conductive coatings by radiofrequency‐powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections

Abstract

Abstract Radiofrequency‐powered glow discharge optical emission spectrometry (rf‐GDOES) can provide rapid quantitative depth profiles of both conductive and non‐conductive coatings. Examples of three types of conductive coatings are shown here: galvanized steel, a TiN hard coating and two electrical coatings. Expected compositions and thicknesses were achieved when both d.c. bias voltage and hydrogen corrections were applied. A new algorithm for calculating the density of mixed metals, oxides and nitrides is presented. The hydrogen correction is also applied to the extreme surface of a metal coating for the first time. Copyright © 2002 John Wiley & Sons, Ltd.