Chemical vapour deposition of SiC and some of its properties

Chemical Vapor Deposition of Single Crystalline β ‐ SiC Films on Silicon Substrate with Sputtered SiC Intermediate Layer

Shigehiro Nishino, Y. Hazuki, Hiroyuki Matsunami et al. · Journal of The Electrochemical Society · 1980 · 180 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reactive plasma deposited SixCyHz films

Y. Catherine, G. Turban · Thin Solid Films · 1979 · 119 citations

Natural Sciences, Materials Science, Physics +10

Epitaxial deposition of silicon carbide from silicon tetrachloride and hexane

W. von Muench, I. Pfaffeneder · Thin Solid Films · 1976 · 77 citations

Engineering, Materials Engineering, Materials Science +15

THE GROWTH OF SINGLE-CRYSTAL FILMS OF CUBIC SILICON CARBIDE ON SILICON

I. H. Khan, R. N. Summergrad · Applied Physics Letters · 1967 · 67 citations

Engineering, Materials Engineering, Materials Science +17

The growth of hetero-epitaxial SiC films by pyrolysis of various alkyl-silicon compounds

Y. Avigal, M. Schieber, Richard Levin · Journal of Crystal Growth · 1974 · 56 citations

Natural Sciences, Materials Engineering, Materials Science +14