Electroluminescence of Ge/Si self-assembled quantum dots grown by chemical vapor deposition

Abstract

We have fabricated light-emitting diodes on Si operating in the near-infrared. The active region of the p–i–n diodes consists of Ge/Si self-assembled quantum dots. The Ge islands were grown in an industrial 200 mm single-wafer chemical vapor deposition reactor. The photoluminescence and the electroluminescence of the islands are resonant in the spectral range around 1.4–1.5 μm wavelength. The electroluminescence is observed up to room temperature.