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Optimal device structure for Pipe-shaped BiCS Flash memory for ultra high density storage device with excellent performance and reliability
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2009
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Non-volatile MemoryElectrical EngineeringStorage SystemsEngineeringExcellent PerformanceAsymmetric Source/drain ProfileFlash MemoryOptimal Device StructureComputer EngineeringComputer ArchitectureData Storage DeviceMemory DeviceSemiconductor MemoryMicroelectronics3D Memory
An asymmetric source/drain profile for select gate and metal salicided control gate are successfully realized on Pipe-shaped Bit Cost Scalable (P-BiCS) Flash memory to achieve data storage device with excellent performance and reliability.