Concepedia

Characterization of BCN film after wet process for interconnection integration

Daisuke Watanabe, Hidemitsu Aoki, Ryota Moriyama, M.K. Mazumder, C. Kimura, Takashi Sugino

Diamond and Related Materials · 2007 · 14 citations · 16 references

DOI

Concepts

References

16

Structural and optical properties of amorphous carbon nitride

Hexiang Han, Bernard J. Feldman · Solid State Communications · 1988 · 347 citations

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Preparation and Properties of Thin Film Boron Nitride

Myron J. Rand, James F. Roberts · Journal of The Electrochemical Society · 1968 · 254 citations

, , +17

Synthesis and characterization of boron carbon nitride films by radio frequency magnetron sputtering

Zhongfu Zhou, I. Bello, M.K. Lei et al. · Surface and Coatings Technology · 2000 · 115 citations

, , +8

Infrared Detection of a Phenylboronic Acid Terminated Alkane Thiol Monolayer on Gold Surfaces

Scott H. Brewer, Angela M. Allen, Simon E. Lappi et al. · Langmuir · 2004 · 110 citations

, , +17

Preparation and Properties of Boron Nitride Films by Metal Organic Chemical Vapor Deposition

K. Nakamura · Journal of The Electrochemical Society · 1986 · 108 citations

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