Optimizing precision of rotating compensator ellipsometry

Abstract

Abstract We present a method especially adapted to the RCE ellipsometer in the PCSA configuration (Polarizer, Compensator, Sample, Analyzer) when measurements with high degree of accuracy are required. The optimum precision conditions can be achieved for any sample by an adjustement of the azimuth of the analyzer and the polarizer. This new method of tracking is used to minimize the random errors and new positions of the analyzer and the polarizer according the sample are given. In these cases, the variances of tan Ψ and tan Δ can be divided up to five. Experimental verification of error reductions is also achieved. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)