Modes of operation of an electrostatic ion gun

Abstract

An improved form of a new type of electrostatic ion gun, which is suitable for ion etching and ion thinning, is described. It is shown that the device has three main modes of operation, namely an `oscillating mode', a `transition mode' and a `general glow discharge mode'. An explanation of these modes, together with the intensity and profile of the emerging ion beam obtained in each case, is given. It is suggested that advantage can be taken of these effects in specific applications.