Publication | Closed Access
Low-Pressure Ion Source
23
Citations
0
References
1972
Year
Materials ScienceElectrical EngineeringLow-pressure Ion SourceEngineeringMiniaturizationMaterials CharacterizationEducationEngineering PhysicsScience And Technology StudiesVacuum ScienceIon BeamVacuum DeviceInstrumentationTechnologyIon Beam InstrumentationIon ProcessStandardizationMaterials Interfaces
Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation R. K. Fitch, G. J. Rushton; Low-Pressure Ion Source. Journal of Vacuum Science and Technology 1 January 1972; 9 (1): 379–382. https://doi.org/10.1116/1.1316619 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science and Technology Search Advanced Search |Citation Search