Microfabrication and imaging XPS analysis of ITO thin films

Abstract

Abstract In this paper the microfabrication of ITO (tin‐doped indium oxide) films by the sol–gel process combined with chemical modification is presented. The microfabricated ITO thin film could be obtained through a one‐step process that combines film patterning with film leaching. The morphology and chemical components of the patterned ITO thin films were assessed by microscopy and XPS, respectively. Imaging XPS analysis is an effective way to evaluate the quality of the fine patterning. Copyright © 2007 John Wiley & Sons, Ltd.