High‐Performance Organic Light‐Emitting Diodes Using ITO Anodes Grown on Plastic by Room‐ Temperature Ion‐Assisted Deposition

Abstract

Ion‐assisted deposition (IAD) was used to deposit smooth, adherent, and electrically/optically high‐quality indium tin oxide (ITO) films on glass and plastic substrates at room temperature. These films afforded organic light‐emitting diode performance comparable to devices with commercial ITO/glass anodes, indicating that IAD is an attractive technique for low‐temperature ITO deposition, especially on plastics (see Figure).