Concepedia

Publication | Closed Access

Enhanced mechanical performance of AlN/nanodiamond micro-resonators

DOI

22

Citations

18

References

2013

Year

N. Heidrich, Dimitre Iankov, Jakob Hees, W. Pletschen, R. E. Sah, Lutz Kirste, Verena Zuerbig, Christoph E. Nebel, O. Ambacher, V. Lebedev
Journal of Micromechanics and Microengineering

Abstract

Art. 125017, 6 S.

References

YearCitations

Page 1