Journal of Crystal Growth · 1986 · 98 citations · 20 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistrySemiconductor MaterialsChemical Vapor DepositionDopingSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor Thin FilmsWide-bandgap Semiconductor DevicesChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsMetalorganic Chemical Vapor Deposition
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M. J. Cherng, R. M. Cohen, G. B. Stringfellow · Journal of Electronic Materials · 1984 · 87 citations