Fracture Tests Of Polysilicon Film

Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films

Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata et al. · Journal of Microelectromechanical Systems · 1998 · 389 citations

Natural Sciences, Materials Engineering, Materials Science +17

Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon

W. N. Sharpe, Bin Yuan, Ranji Vaidyanathan et al. · 1997 · 270 citations

Engineering, Materials Engineering, Materials Science +17

New test structures and techniques for measurement of mechanical properties of MEMS materials

W. N. Sharpe, Bin Yuan, Ranji Vaidyanathan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1996 · 73 citations

Engineering, Materials Engineering, Materials Science +17

Mechanical properties of thick, surface micromachined polysilicon films

H. Kahn, Susanne Stemmer, Krishnan Nandakumar et al. · 2002 · 44 citations

Engineering, Materials Engineering, Materials Science +17

Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films

Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata et al. · 2002 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +17