Fabrication of Nb/Al,AlOx/Al/Nb Josephson tunnel junctions using reactive ion etching in SF6

Derk Jan Adelerhof, M.E. Bijlsma, P.B.M. Fransen, T. Weiman, Jakob Flokstra, Horst Rogalla

Physica C Superconductivity · 1993 · 18 citations · 22 references

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