Concepedia

Characterization of carbon nitride thin films deposited by a combined RF and DC plasma beam

Gheorghe Dinescu, E Eugen Aldea, G. Musa, M. C. M. van de Sanden, Anneke de Graaf, Corneliu Ghica, M. Gärtner, A. H. Andrei

Thin Solid Films · 1998 · 27 citations · 25 references

DOI

Concepts

References

25

Experimental Realization of the Covalent Solid Carbon Nitride

Chunming Niu, Yuan Z. Lu, Charles M. Lieber · Science · 1993 · 895 citations

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Carbon Nitride Deposited Using Energetic Species: A Two-Phase System

D. Marton, Kevin J. Boyd, A. Al-Bayati et al. · Physical Review Letters · 1994 · 769 citations

, , +13

Structural and optical properties of amorphous carbon nitride

Hexiang Han, Bernard J. Feldman · Solid State Communications · 1988 · 347 citations

, , +14

Excitation equilibria in plasmas; a classification

J.A.M. van der Mullen · Physics Reports · 1990 · 325 citations

, , +9

Structural and mechanical properties of carbon nitride CN<i>x</i> (0.2⩽<i>x</i>⩽0.35) films

H. Sjöström, Lars Hultman, J.‐E. Sundgren et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 228 citations

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