Concepedia

Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair

J.B. Park, C.J. Kim, P.E. Shin, Sehyun Park, Hee‐Jin Kang, Sungho Jeong

Applied Surface Science · 2006 · 17 citations · 12 references

DOI

Concepts

References

12

Handbook of optical materials

Choice Reviews Online · 2003 · 311 citations

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Laser chemical vapor deposition of selected area Fe and W films

Susan D. Allen, A. B. Tringubo · Journal of Applied Physics · 1983 · 76 citations

, , +13

Deposition of refractory metal films by rare-gas halide laser photodissociation of metal carbonyls

Diane K. Flynn, Jeffrey I. Steinfeld, Dhanwant S. Sethi · Journal of Applied Physics · 1986 · 73 citations

, , +14

Direct writing of metal conductors with near-uv light

H. H. Gilgen, T. Cacouris, Ping-Shine Shaw et al. · Applied Physics B · 1987 · 72 citations

, , +12

Laser-induced chemical vapor deposition of metals for microelectronics technology

Thomas H. Baum, Paul B. Comita · Thin Solid Films · 1992 · 63 citations

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