Laser chemical vapor deposition of selected area Fe and W films

Abstract

Localized deposition of thin films of W and Fe in both spot and line geometries has been demonstrated by laser chemical vapor deposition using a CO2 laser and several different gaseous reactants. Although optical self-limiting of the deposit thickness was observed under some irradiation conditions, films several thousand Å thick could be deposited with good physical properties. Radial dimensions were less than or equal to the laser beam diameter (D1/e2 =600 μm).