Concepedia

Element composition and electrochemical behaviour of polycrystalline AlN thin films

V. Dimitrova, D. Manova, R. Djulgerova

Surface and Coatings Technology · 2000 · 16 citations · 11 references

DOI

Concepts

References

11

Applications of Aluminium Nitride Films Deposited by Reactive Sputtering to Silicon-On-Insulator Materials

Stefan Bengtsson, Mats Bergh, M. Choumas et al. · Japanese Journal of Applied Physics · 1996 · 66 citations

, , +17

Low temperature growth of r.f. reactively planar magnetron-sputtered AlN films

M. Penza, M.F. De Riccardis, L. Mirenghi et al. · Thin Solid Films · 1995 · 58 citations

, , +10

Aluminum nitride and alumina composite film fabricated by DC plasma processes

Paul W. Wang, Shixian Sui, Wensheng Wang et al. · Thin Solid Films · 1997 · 52 citations

, , +16

Infrared reflectance of thin aluminum nitride films on various substrates

M. F. MacMillan, Robert P. Devaty, W. J. Choyke · Applied Physics Letters · 1993 · 38 citations

, , +17

Low-Temperature Growth and Measurement of Oxygen in Reactively Sputtered AlN Thin Films

Sunil Kumar, T.L. Tansley · Japanese Journal of Applied Physics · 1995 · 33 citations

, , +17