Applied Physics Letters · 1991 · 35 citations · 5 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureElectronic MaterialsSurface ScienceElectron MicroscopyNanostructured Electronic MaterialsSemiconducting MaterialsSuperconducting MaterialsSuperconducting Thin FilmsTransmission Electron MicroscopyCross-sectional MicroscopyCrystalline StructureJosephson JunctionsJosephson TunnelingPolycrystalline Thin FilmsSuperconducting Nanostructures
A study of microstructure of Nb/AlOx-Al/Nb Josephson junctions by cross-sectional transmission electron microscopy yielded much information regarding the junction barrier region. Both thick Nb and several-nanometer Al form polycrystalline films with columnar structures. Nb is oriented to the (110) plane, and Al is (111). The 200 nm lower Nb has a wavy surface with ∼5 nm smoothness, but its surface is planarized by several nanometers Al deposited on it. Thus AlOx with a smoothness under 1 nm can be formed on Al. The upper Nb has a good crystalline structure even just above the AlOx barrier.
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S. Hasuo, T. Imamura · Proceedings of the IEEE · 1989 · 58 citations
Engineering, Computer Engineering, Electrical Engineering +12