Imaging of in- and out-of-plane vibrations in micromechanical resonator

Abstract

Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilising the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lamé modes in a square plate resonator.