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Deep submicron 3D surface metrology for 300 mm wafer characterization using UV coherence microscopy

Wafer Scale ProcessingEngineeringPhysicsMicrofabricationOptical PropertiesMicroscopySurface ScienceApplied PhysicsSurface MetrologyNatural SciencesMicroscopy MethodScanning Probe MicroscopyUv Coherence MicroscopyDeep Submicron 3DMicroelectronics3D PrintingDimensional MetrologyNanolithography Method