Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 33 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsChemical Vapor DepositionEpitaxial GrowthPhotovoltaic DevicesSemiconductor Device MaterialsSolar Cell MaterialsSolar CellsEpitaxial Film GrowthFilm Growth MechanismsHeterojunction Solar CellsMetalorganic Chemical Vapor DepositionMolecular Beam EpitaxySolar Cell Fabrication
Previously, solar cells fabricated from molecular-beam epitaxually (MBE)-grown material have been inferior in performance to those fabricated from metalorganic chemical vapor deposited (MOCVD) material. We have obtained 1-sun air mass (AM) 1.5 efficiencies of 23.8% for 0.25 cm2 GaAs solar cells fabricated on MBE-grown material. This is the first solar cell fabricated on MBE material which is of comparable performance to solar cells fabricated on MOCVD material. Details of the MBE system preparation and film growth procedure along with a detailed evaluation of the solar cells will be presented.