Publication | Closed Access
Surface roughness of ion implanted 〈100〉 silicon studied by atomic force microscopy
15
Citations
5
References
1995
Year
Materials ScienceAtomic Force MicroscopyIon ImplantationEngineeringSurface RoughnessMicroscopy〈100〉 SiliconSurface ScienceApplied PhysicsScanning Force Microscopy
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