Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 91 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsChemical Vapor DepositionField-effect TransistorsDiamond Semiconductor DevicesDiamond SemiconductorsElectric Field IntensityField EmissionPolycrystalline Thin Films
Vapor-deposited-diamond field emitters are fabricated using diamond film technology compatible with integrated circuit processing. The field emission data from p-type polycrystalline diamond films are presented. Field emission current in the range of 15 μA was detected at an electric field intensity of <20 MV/m at a pressure of 10−7 Torr. A current of approximately 50 nA was observed at a pressure up to 10−2 Torr in H2 environment.