Preparation of hard coatings by ion beam methods

Thin Film Phenomena

K. L. Chopra, Julius Klerrer · Journal of The Electrochemical Society · 1970 · 2K citations

Thin Film Physics, Engineering, Physics +12

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

Materials Science, Materials Engineering, Electrical Engineering +14

Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1975 · 432 citations

Engineering, Cu Coatings, Chemical Deposition +19

Activated Reactive Evaporation Process for High Rate Deposition of Compounds

R.F. Bunshah, AC Raghuram · Journal of Vacuum Science and Technology · 1972 · 194 citations

Materials Science, High Rate Deposition, Chemical Engineering +13

The deposition of hard surface layers by hydrocarbon cracking in a glow discharge

D.S. Whitmell · Thin Solid Films · 1976 · 156 citations

Materials Science, Engineering, Glow Discharge +9