Concepedia

FEM simulation of Rayleigh waves for CMOS compatible SAW devices based on AlN/SiO2/Si(100)

Udo Christian Kaletta, Christian Wenger

Ultrasonics · 2013 · 43 citations · 3 references

DOI

Concepts

References

3

Growth of high purity AlN crystals

Glen A. Slack, T. McNelly · Journal of Crystal Growth · 1976 · 449 citations

, , +6

Dielectric Properties of Reactively Sputtered Films of Aluminum Nitride

A. J. Noreika, M. H. Francombe, S. A. Zeitman · Journal of Vacuum Science and Technology · 1969 · 85 citations

, , +13

AlN thin films grown on epitaxial 3C–SiC (100) for piezoelectric resonant devices

Chih‐Ming Lin, Wei-Cheng Lien, Valery V. Felmetsger et al. · Applied Physics Letters · 2010 · 78 citations

, , +14