Diffusion of copper through dielectric films under bias temperature stress

Fowler-Nordheim Tunneling into Thermally Grown SiO2

M. Lenzlinger, E. H. Snow · Journal of Applied Physics · 1969 · 1.7K citations

Semiconductors, Semiconductor Technology, Electrical Engineering +15

Deep impurities in semiconductors

J. Llacer · Journal of Crystal Growth · 1974 · 785 citations

Semiconductors, Semiconductor Technology, Engineering +7

Diffusion of Metals in Silicon Dioxide

J. D. McBrayer, R.M. Swanson, T. W. Sigmon · Journal of The Electrochemical Society · 1986 · 526 citations

Materials Science, Silver Diffusion, Solid Solubility +10

Copper Transport in Thermal SiO2

Yosi Shacham‐Diamand, A. Dedhia, D. Hoffstetter et al. · Journal of The Electrochemical Society · 1993 · 239 citations

Engineering, Thermal Conductivity, Semiconductors +16

Impact of copper contamination on the quality of silicon oxides

H. Wendt, H. Cerva, V. Lehmann et al. · Journal of Applied Physics · 1989 · 95 citations

Materials Science, Materials Engineering, Chemical Engineering +15