Diffusion of copper through dielectric films under bias temperature stress

Fowler-Nordheim Tunneling into Thermally Grown SiO2

M. Lenzlinger, E. H. Snow · Journal of Applied Physics · 1969 · 1.7K citations

Natural Sciences, Materials Science, Physics +14

Deep impurities in semiconductors

J. Llacer · Journal of Crystal Growth · 1974 · 785 citations

Engineering, Materials Science, Physics +12

Diffusion of Metals in Silicon Dioxide

J. D. McBrayer, R.M. Swanson, T. W. Sigmon · Journal of The Electrochemical Society · 1986 · 528 citations

Natural Sciences, Materials Engineering, Materials Science +17

Copper Transport in Thermal SiO2

Yosi Shacham‐Diamand, A. Dedhia, D. Hoffstetter et al. · Journal of The Electrochemical Society · 1993 · 241 citations

Engineering, Materials Engineering, Materials Science +17

Impact of copper contamination on the quality of silicon oxides

H. Wendt, H. Cerva, V. Lehmann et al. · Journal of Applied Physics · 1989 · 95 citations

Engineering, Materials Engineering, Materials Science +17