Modeling of thermal and mechanical stresses in silicon microstructures - Concepedia

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Modeling of thermal and mechanical stresses in silicon microstructures

38

Citations

2

References

1990

Year

F. Pourahmadi, P.W. Barth, K. Petersen

Sensors and Actuators A Physical

EngineeringMechanical EngineeringApplied PhysicsStressstrain AnalysisMechanical StressesSolid MechanicsElectronic PackagingSilicon On InsulatorMicroelectronicsMechanics Of MaterialsMicrostructureSilicon Debugging

References

	Year	Citations

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