A mechanistic study of SF6 reactive ion etching of tungsten

Handbook of X-Ray Photoelectron Spectroscopy

J. F. Moulder · Medical Entomology and Zoology · 1995 · 23.7K citations

Natural Sciences, Chemistry, Materials Science +10

Hartree-Slater subshell photoionization cross-sections at 1254 and 1487 eV

J. H. Scofield · Journal of Electron Spectroscopy and Related Phenomena · 1976 · 5.9K citations

Natural Sciences, Chemistry, Physics +7

Plasma etching of Si and SiO2 in SF6–O2 mixtures

Riccardo d’Agostino, Daniel Flamm · Journal of Applied Physics · 1981 · 272 citations

Natural Sciences, Materials Engineering, Materials Science +16

Dry Etching of Polyimide in  O 2 ‐  CF 4 and  O 2 ‐  SF 6 Plasmas

G. Turban, Michel Rapeaux · Journal of The Electrochemical Society · 1983 · 117 citations

Natural Sciences, Materials Engineering, Materials Science +17

Plasma diagnostics of a SF₆radiofrequency discharge used for the etching of silicon

A. Picard, G. Turban, B. Grolleau · Journal of Physics D Applied Physics · 1986 · 106 citations

Natural Sciences, Materials Science, Physics +13