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On-the-fly calibration of linear and rotary axes of machine tools and CMMs using a tracking interferometer

Sensor CalibrationEngineeringMeasurementCalibrationTracking InterferometerMechanical EngineeringMechatronicsMechanical SystemsMachine ToolEducationSystems EngineeringRotary AxesGeometrical AccuracyKinematicsPrecision Mechanical TestingInstrumentationMeasurement SystemMachine Tools