Characterization of the main error sources of chromatic confocal probes for dimensional measurement

Abstract

Chromatic confocal probes are increasingly used in high-precision dimensional metrology applications such as roughness, form, thickness and surface profile measurements; however, their measurement behaviour is not well understood and must be characterized at a nanometre level. This paper provides a calibration bench for the characterization of two chromatic confocal probes of 20 and 350 µm travel ranges. The metrology loop that includes the chromatic confocal probe is stable and enables measurement repeatability at the nanometer level. With the proposed system, the major error sources, such as the relative axial and radial motions of the probe with respect to the sample, the material, colour and roughness of the measured sample, the relative deviation/tilt of the probe and the scanning speed are identified. Experimental test results show that the chromatic confocal probes are sensitive to these errors and that their measurement behaviour is highly dependent on them.