Optics Express · 2000 · 29 citations · 10 references
EngineeringManufacturing EngineeringMaterials EngineeringDrillingMicrofabricationPhotonicsLaser Material ProcessingLaser PhysicsMachiningMicrofabrication MaterialsMicrofabrication ProcessesUltrafast OpticsLaser AblationLaser DrillingLaser MicromachiningLasersPrecisionPrinted Circuit BoardsSiliconUltrafast Laser Material Processing
Visible and UV lasers with nanosecond pulse durations, diffraction-limited beam quality and high pulse repetition rates have demonstrated micro-ablation in a wide variety of materials with sub-micron precision and sub-micron-sized heat-affected zones. The copper vapour laser (CVL) is one of the important industrial lasers for micro-ablation applications. Manufacturing applications for the CVL include orifice drilling in fuel injection components and inkjet printers, micro-milling of micromoulds, via hole drilling in printed circuit boards and silicon machining. Recent advances in higher power (100W visible, 5W UV), diffraction-limited, compact CVLs are opening new possibilities for manufacturing with this class of nanosecond laser.
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Precision micromachining with pulsed green lasers
Jim J. Chang, Bruce E. Warner, E.P. Dragon et al. · Journal of Laser Applications · 1998 · 88 citations
Microdrilling of metals with ultrashort laser pulses
Hans Kurt Tönshoff, C. Momma, Andreas Ostendorf et al. · Journal of Laser Applications · 2000 · 63 citations