A study on mechanism of nano-cutting single crystal silicon

New empirical model for the structural properties of silicon

J. Tersoff · Physical Review Letters · 1986 · 1.4K citations

Natural Sciences, Chemistry, Materials Science +17

Ductile-regime machining model for diamond turning of brittle materials

W.S. Blackley, R.O. Scattergood · Precision Engineering · 1991 · 279 citations

Engineering, Manufacturing Engineering, Materials Engineering +11

Modelling and experimental investigation on nanometric cutting of monocrystalline silicon

Fengzhou Fang, Hu Wu, Y.C. Liu · International Journal of Machine Tools and Manufacture · 2005 · 262 citations

Engineering, Materials Engineering, Materials Science +13

Raman microspectroscopy study of processing-induced phase transformations and residual stress in silicon

Yury Gogotsi, Chang‐Wook Baek, F.‐G. Kirscht · Semiconductor Science and Technology · 1999 · 235 citations

Natural Sciences, Materials Engineering, Materials Science +16

Feasibility Study on Ultimate Accuracy in Microcutting Using Molecular Dynamics Simulation

Shoichi Shimada, Naoya Ikawa, Hiroaki Tanaka et al. · CIRP Annals · 1993 · 191 citations

Natural Sciences, Materials Engineering, Materials Science +12